GRS-V: Rotatable Magnetron

GRS-V is a vertically-mounted rotatable magnetron by Gencoa, a recent addition to the Gencoa Rotatable System product range. The GRS-V features high power capacity and water flow, excellent end-block vacuum integrity and has a water drain feature for easy target change within the chamber.

Its unique design addresses the key points in reliable sputter process delivery for high volume applications. The GRS-V end-block and magnetic arrays are designed to reduce the cost of ownership for the decorative and functional coating environments.

The GRS-V is a purpose designed vertical source and contains the key feature of motor or manual adjustment of the race track angular position. The GRS-V is aimed at display coaters with in-line or static glass, also batch coaters for decorative and hard coating and high power metallizing of plastic parts.

Advantages

• Can use varying target diameters
• Double seals for target mounting and double screws target clamping
• 快速释放磁铁棒箱内cha目标nging
• Variable target to chamber plate distances (please specify on order)
• High water flow and power delivery
• Market leading integrity of vacuum seals – better than 5x10^-8mbar l/s He leak rate under rotation and > 3 year dynamic seal life guarantee
• Easy to maintain
• Can be used in conjunction with Gencoa gas bars, Active Anode, Optix and Speedflo
• Array angle positioning for pre-cleaning targets in the reverse direction
• No out-bound support required for vertical down orientation
• Utilises Gencoa's high performance magnetics designed for different production needs:
  • XPP extremely unbalanced for reactive ion assisted deposition (hard coating)
  • PP unbalanced magnetics for decorative coating of plastics
  • HS high strength for ITO, magnetic targets and high power metallizing
  • DLIMAA, double low impedance magnetics with Active Anode for higher density, lower stress layers
  • Gencoa can provide complete system magnetic layouts for different power modes and applications with optional on-site process installation

Key features

• Up to 3m long targets
• Port mounted externally to chamber
• Accommodation of Ø90, Ø100, Ø125 & Ø152 mm targets
• ¾” ID water connections for high flow
• Direct drive of target rotation – no tensioned belt
• DC motor drive with RS-485 interface and possible PLC integration
• High current Harting power connection
• Manual or motorised array positioning for multiple substrate location or target cleaning
• Operational speed up to 15RPM

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